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DLight S

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Semiconductor Wafer Annealing System

Ultra-narrow beam width, high power density

Modular design, easy maintenance

High product consistency

Multiple additional functions

Applicable for dynamic surface annealing, laser spike annealing, film annealing, and material surface treatment

DLight S

Key Specifications

Part No.
All FL-DLight-S1500A
Product Code
All (Typical Customization)
Power Output
All 1500 W
Beam Size
All 12 mm (top-hat) x 70 µm (gaussian)
Power Stability
All > 98 %
Beam Length: Uniformity
All ≥ 95 %
Beam Width: Stability
All ± 1 µm
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FL-DLight-S1500A (Typical Customization) 1500 W 12 mm (top-hat) x 70 µm (gaussian) > 98 % ≥ 95 % ± 1 µm
* Typical customization of products. Longer lead time may apply to custom products.

Applications

Semiconductor Manufacturing Processes

Semiconductor Manufacturing Processes
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