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DLight S

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Semiconductor Wafer Annealing System

Ultra-narrow beam width, high power density

Modular design, easy maintenance

High product consistency

Multiple additional functions

Applicable for dynamic surface annealing, laser spike annealing, film annealing, and material surface treatment

DLight S

Key Specifications

Part No. Product Code Power Output Beam Size Power Stability Beam Length: Uniformity Beam Width: Stability Download
FL-DLight-S1500A (Typical Customization) 1500 W 12 mm (top-hat) x 70 µm (gaussian) > 98 % ≥ 95 % ± 1 µm
* Typical customization of products. Longer lead time may apply to custom products.

Applications

Semiconductor Manufacturing Processes

Semiconductor Manufacturing Processes
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