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Off-Axis Beam Shaper

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Generates a homogeneous field of ≥ 180 x 180 mm² with a top-hat profile along both axes under a specified illumination angle

Optical efficiency up to 90 %, inhomogeneity across entire area < 7.5%

Suitable for many different laser sources (e.g., diode laser, solid-state laser, and excimer)

Versatile in various application fields, e.g., material refinement, machine vision, and industrial contactless inspection

Off-Axis 光束整形模块

Key Specifications

Part No. Product Code Dimensions AR Coating BFL Pitch Divergence Angle Download
Off-Axis Beam Shaper, TopHat of 180 x 180 mm² IOS000292 * 808 nm ≤ 200 W 400 μm 680 ± 25 mm 15 ± 3° (typical 15 ± 1.5°)
* Typical customization of products. Longer lead time may apply to custom products.

Applications

Inspection

Inspection
Semiconductor Manufacturing Processes

Semiconductor Manufacturing Processes
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