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Homogenizers

Homogenizers can handle a wide range of field geometries and beam shapes - top hat, rectangular, square and lines - typical full angle from 0.20 to 11.21 deg

Homogeneity up to the technical limits (up to 1% non-uniformity)

High NA, high fill factor and retention of polarization

Optical efficiency up to 90 % help to cut the cost of expensive laser energy

Manufactured from high-quality materials, e.g., fused silica, CaF2, suitable for many different laser sources (e.g., excimer laser, solid-state laser, diode laser)

Customized freeform surfaces with highest precision on different wafer sizes (up to 300 mm)

光场匀化器

Key Specifications

Part No.
All Double Sided Homogenizer Single Sided Homogenizer
Product Code
All ZLA000743 * ZLA000742 * ZLA000745 * ZLA000744 * ZLA000781 ZLA001688 * ZLA001687 * ZLA000772 ZLA000788 * ZLA001689 * ZLA000787 * ZLA001101 * ZLA000794 * ZLA000791 * ZLA000800 * ZLA000796 * ZLA000218 * ZLA001102 * ZLA000486 * ZLA001103 * ZLA000488 * ZLA000487 * ZLA000507 ZLA001104 ZLA000243 * ZLA001105 * ZLA000509 * ZLA001106 * ZLA000511 * ZLA001107 * ZLA000229 * ZLA001108 * ZLA000230 * ZLA001109 ZLA000237 * ZLA001110 * ZLA000234 * ZLA000601 * ZLA000238 * ZLA000479 ZLA000240 * ZLA000239 ZLA000481 ZLA000233 * ZLA000485 * ZLA001111 *
Dimensions
All 35.0 x 35.0 x 2.0 mm 20.0 x 20.0 x 2.0 mm 12.0 x 12.0 x 2.0 mm
EFL
All 111.11 mm 55.56 mm 27.78 mm 14.44 mm 37.78 mm -111.11 mm 18.67 mm 9.78 mm 6.64 mm 37.11 mm 54.22 mm 24.67 mm 19.33 mm 9.67 mm 233.33 mm 106.67 mm 173.33 mm 46.67 mm 31.11 mm 7.78 mm 12.22 mm 4.78 mm 69.56 mm
AR Coating
All Uncoated
Divergence Angle
All 0.67° 1.34° 2.68° 5.16° 1.97° 3.99° 7.62° 11.21° 1.24° 0.85° 1.86° 2.37° 4.74° 0.20° 0.43° 0.26° 0.61° 0.92° 3.68° 2.34° 6.00° 0.41°
Radius
All 50 mm 25 mm 12.5 mm 6.5 mm 17 mm -50 mm 8.4 mm 4.4 mm 2.99 mm 16.7 mm 24.4 mm 11.1 mm 8.7 mm 4.35 mm 105 mm 48 mm 78 mm 21 mm 14 mm 3.5 mm 5.5 mm 2.15 mm 31.3 mm
Pitch
All 1.3 mm 0.8 mm 0.5 mm
Download
Single Sided Homogenizer ZLA001111 * 12.0 x 12.0 x 2.0 mm 69.56 mm Uncoated 0.41° 31.3 mm 0.5 mm
Double Sided Homogenizer ZLA000485 * 12.0 x 12.0 x 2.0 mm 69.56 mm Uncoated 0.41° 31.3 mm 0.5 mm
Single Sided Homogenizer ZLA000233 * 12.0 x 12.0 x 2.0 mm 4.78 mm Uncoated 6.00° 2.15 mm 0.5 mm
Double Sided Homogenizer ZLA000481 12.0 x 12.0 x 2.0 mm 4.78 mm Uncoated 6.00° 2.15 mm 0.5 mm
Single Sided Homogenizer ZLA000239 12.0 x 12.0 x 2.0 mm 12.22 mm Uncoated 2.34° 5.5 mm 0.5 mm
Double Sided Homogenizer ZLA000240 * 12.0 x 12.0 x 2.0 mm 12.22 mm Uncoated 2.34° 5.5 mm 0.5 mm
Single Sided Homogenizer ZLA000479 12.0 x 12.0 x 2.0 mm 7.78 mm Uncoated 3.68° 3.5 mm 0.5 mm
Double Sided Homogenizer ZLA000238 * 12.0 x 12.0 x 2.0 mm 7.78 mm Uncoated 3.68° 3.5 mm 0.5 mm
Single Sided Homogenizer ZLA000601 * 12.0 x 12.0 x 2.0 mm 31.11 mm Uncoated 0.92° 14 mm 0.5 mm
Double Sided Homogenizer ZLA000234 * 12.0 x 12.0 x 2.0 mm 31.11 mm Uncoated 0.92° 14 mm 0.5 mm
Single Sided Homogenizer ZLA001110 * 12.0 x 12.0 x 2.0 mm 46.67 mm Uncoated 0.61° 21 mm 0.5 mm
Double Sided Homogenizer ZLA000237 * 12.0 x 12.0 x 2.0 mm 46.67 mm Uncoated 0.61° 21 mm 0.5 mm
Single Sided Homogenizer ZLA001109 20.0 x 20.0 x 2.0 mm 173.33 mm Uncoated 0.26° 78 mm 0.8 mm
Double Sided Homogenizer ZLA000230 * 20.0 x 20.0 x 2.0 mm 173.33 mm Uncoated 0.26° 78 mm 0.8 mm
Single Sided Homogenizer ZLA001108 * 20.0 x 20.0 x 2.0 mm 106.67 mm Uncoated 0.43° 48 mm 0.8 mm
Double Sided Homogenizer ZLA000229 * 20.0 x 20.0 x 2.0 mm 106.67 mm Uncoated 0.43° 48 mm 0.8 mm
Single Sided Homogenizer ZLA001107 * 20.0 x 20.0 x 2.0 mm 233.33 mm Uncoated 0.20° 105 mm 0.8 mm
Double Sided Homogenizer ZLA000511 * 20.0 x 20.0 x 2.0 mm 233.33 mm Uncoated 0.20° 105 mm 0.8 mm
Single Sided Homogenizer ZLA001106 * 20.0 x 20.0 x 2.0 mm 9.67 mm Uncoated 4.74° 4.35 mm 0.8 mm
Double Sided Homogenizer ZLA000509 * 20.0 x 20.0 x 2.0 mm 9.67 mm Uncoated 4.74° 4.35 mm 0.8 mm
Single Sided Homogenizer ZLA001105 * 20.0 x 20.0 x 2.0 mm 19.33 mm Uncoated 2.37° 8.7 mm 0.8 mm
Double Sided Homogenizer ZLA000243 * 20.0 x 20.0 x 2.0 mm 19.33 mm Uncoated 2.37° 8.7 mm 0.8 mm
Single Sided Homogenizer ZLA001104 20.0 x 20.0 x 2.0 mm 24.67 mm Uncoated 1.86° 11.1 mm 0.8 mm
Double Sided Homogenizer ZLA000507 20.0 x 20.0 x 2.0 mm 24.67 mm Uncoated 1.86° 11.1 mm 0.8 mm
Single Sided Homogenizer ZLA000487 * 20.0 x 20.0 x 2.0 mm 54.22 mm Uncoated 0.85° 24.4 mm 0.8 mm
Double Sided Homogenizer ZLA000488 * 20.0 x 20.0 x 2.0 mm 54.22 mm Uncoated 0.85° 24.4 mm 0.8 mm
Single Sided Homogenizer ZLA001103 * 20.0 x 20.0 x 2.0 mm 37.11 mm Uncoated 1.24° 16.7 mm 0.8 mm
Double Sided Homogenizer ZLA000486 * 20.0 x 20.0 x 2.0 mm 37.11 mm Uncoated 1.24° 16.7 mm 0.8 mm
Single Sided Homogenizer ZLA001102 * 35.0 x 35.0 x 2.0 mm 6.64 mm Uncoated 11.21° 2.99 mm 1.3 mm
Double Sided Homogenizer ZLA000218 * 35.0 x 35.0 x 2.0 mm 6.64 mm Uncoated 11.21° 2.99 mm 1.3 mm
Single Sided Homogenizer ZLA000796 * 35.0 x 35.0 x 2.0 mm 9.78 mm Uncoated 7.62° 4.4 mm 1.3 mm
Double Sided Homogenizer ZLA000800 * 35.0 x 35.0 x 2.0 mm 9.78 mm Uncoated 7.62° 4.4 mm 1.3 mm
Single Sided Homogenizer ZLA000791 * 35.0 x 35.0 x 2.0 mm 18.67 mm Uncoated 3.99° 8.4 mm 1.3 mm
Double Sided Homogenizer ZLA000794 * 35.0 x 35.0 x 2.0 mm 18.67 mm Uncoated 3.99° 8.4 mm 1.3 mm
Single Sided Homogenizer ZLA001101 * 35.0 x 35.0 x 2.0 mm -111.11 mm Uncoated 0.67° -50 mm 1.3 mm
Double Sided Homogenizer ZLA000787 * 35.0 x 35.0 x 2.0 mm -111.11 mm Uncoated 0.67° -50 mm 1.3 mm
Single Sided Homogenizer ZLA001689 * 35.0 x 35.0 x 2.0 mm 37.78 mm Uncoated 1.97° 17 mm 1.3 mm
Double Sided Homogenizer ZLA000788 * 35.0 x 35.0 x 2.0 mm 37.78 mm Uncoated 1.97° 17 mm 1.3 mm
Single Sided Homogenizer ZLA000772 35.0 x 35.0 x 2.0 mm 14.44 mm Uncoated 5.16° 6.5 mm 1.3 mm
Double Sided Homogenizer ZLA001687 * 35.0 x 35.0 x 2.0 mm 14.44 mm Uncoated 5.16° 6.5 mm 1.3 mm
Single Sided Homogenizer ZLA001688 * 35.0 x 35.0 x 2.0 mm 27.78 mm Uncoated 2.68° 12.5 mm 1.3 mm
Double Sided Homogenizer ZLA000781 35.0 x 35.0 x 2.0 mm 27.78 mm Uncoated 2.68° 12.5 mm 1.3 mm
Single Sided Homogenizer ZLA000744 * 35.0 x 35.0 x 2.0 mm 55.56 mm Uncoated 1.34° 25 mm 1.3 mm
Double Sided Homogenizer ZLA000745 * 35.0 x 35.0 x 2.0 mm 55.56 mm Uncoated 1.34° 25 mm 1.3 mm
Single Sided Homogenizer ZLA000742 * 35.0 x 35.0 x 2.0 mm 111.11 mm Uncoated 1.34° 25 mm 1.3 mm
Double Sided Homogenizer ZLA000743 * 35.0 x 35.0 x 2.0 mm 111.11 mm Uncoated 0.67° 50 mm 1.3 mm
* Typical customization of products. Longer lead time may apply to custom products.

Applications

Semiconductor Manufacturing Processes

Semiconductor Manufacturing Processes
Plastic Welding

Plastic Welding
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